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Technical Sessions
Technical session chairmen and speakers are included in the listing of the Technical Program. The chairmen have assembled a 2010 Workshop program of highly qualified and renowned technologists from the U.S., Europe, and Asia, representing the latest advancements in the field of nano- and micro-lithography. We will also explore the developments in 3-D architecture and their potential advantages.
Technical sessions will run Monday – Thursday. Morning sessions begin at 8 AM, and evening sessions typically end by 10 PM.
- Sunday November 7, 2010: Registration: 5 – 9 PM. Welcome Reception: 6 – 9 PM
- Monday thru Wednesday November 8-10: 8 AM – 10 PM
- Thurs. November 11: 8 AM – 5 PM.
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Sunday
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Monday
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Tuesday |
Wednesday |
Thursday
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Program |
Program |
Program |
Program |
Program |
| 7:00 |
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Breakfast |
Breakfast |
Breakfast |
Breakfast |
| 7:30 |
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| 8:00 |
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Welcome |
Plenary1: Toshikazu Umatate, Nikon VP |
Plenary 3: J. Warlaumont
VP Sematech |
Mike Thompson, Cornell |
| 8:25 |
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Plenary 2: Tatsuhiko Higashiki; Toshiba |
Joy Cheng IBM |
| 8:50 |
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David Pan, UT Austin |
Andrezej Strojwas, CMU |
Franklin Kalk, Photomask |
| 9:15 |
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John Knickerbocker, IBM |
Naoya Hayashi, DNP |
Andreas Wild; ENIAC |
Rudi Hendel, Periodic Structures |
| 9:40 |
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Lars Liebmann, IBM |
Tim Crimmins; Intel |
Paul Nealey, UW |
Andy Neureuther, Berkeley |
| 10:05 |
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Coffee Break |
| 10:35 |
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Hans Meiling, ASML |
Mark MacCord, KLA-Ten |
SV Sreenivasan, UTA |
Chris Bencher, AMAT |
| 11:00 |
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Serge Tedesco, LETI |
Simon Wong, Stanford |
Bruno LaFontaine, Cymer |
Kevin Lucas, Synopsys |
| 11:25 |
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Lloyd Litt, Sematech |
Vivek Subramanian, UCB |
Yu Cao; Brion |
Andrew Kahng, UCSD |
| 11:50 |
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Chris Progler, Photronics |
Karl K. Berggren MIT |
Hank Smith, Lumarray |
Chenson Chen, MITLL |
| 12:15 |
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Patrick Naulleau, LBNL |
Andrew Grenville (Inpria) |
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| 12:45 |
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Networking |
| 1:15 |
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| 1:40 |
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James Blatchford; TI |
| 2:05 |
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Juan de Pablo, U Wisc |
| 2:30 |
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Carlos Fonseca, TEL |
| 2:55 |
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coffee break |
| 3:25 |
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Rick Uchida, TOK |
| 3:50 |
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John Warlaumont, Sematech |
| 4:15 |
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Ed Holland, HP |
| 5:00 |
Registration starts at 5 |
Reception (Posters - listed at right) |
Reception (Posters) |
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| 5:30 |
Reception |
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| 6:00 |
Reception, Activities Signup, Tomilyn Clark, Glass Artist: Info and Sales Table |
Banquet |
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| 6:30 |
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| 7:00 |
Wes Hansford, Mosis/ISI - 3D |
Soichi Owa, Nikon |
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| 7:25 |
Leo Pang, Luminescent |
Yuri Granik; Mentor |
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| 7:50 |
Luigi Capodieci, GF |
Walter Hu, UT Dallas |
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| 8:15 |
Cliff Henderson (Georgia Tech) |
Tom Wallow (Global Foundries) |
Panel: Optical vs EUV (Lars Liebmann IBM + TBD vs. Bill Arnold ASML + TBD ) |
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| 8:40 |
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Mike Rieger, Synopsys |
Kameshwar Poolla; IMPACT |
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| 9:05 |
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Vincent Wiaux, IMEC |
Matt Nowak, Qualcomm |
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